Industrial applications of homogenous dielectric barrier discharge in air technology

Xiangqian Xie, Zhi Fang, Hao Yang, Zhan Qiu, Longzhang Zhao, Yuchang Qiu

Research output: Contribution to journalArticlepeer-review

9 Scopus citations

Abstract

The latest progress in research, development, and industrial applications of the homogenous dielectric barrier discharge (DBD) technology under atmosphere pressure was tentatively reviewed in a thought provoking way. The discussion centers on the strengths of the DBD technology, such as low cost, high efficiency, film quality optimization, and its possible industrial applications. The technical problem that inert gas protection increases the cost and lowers the efficiency can be solved by a judicious choice of DBD conditions, including power supply, electrode geometry and barrier materials. The research projects of technological interest, its discharge mechanisms and its diagnosis methods in particular, were also discussed.

Original languageEnglish
Pages (from-to)649-658
Number of pages10
JournalZhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology
Volume29
Issue number6
DOIs
StatePublished - Dec 2009

Keywords

  • Air
  • Dielectric barrier discharge
  • Electrode configuration
  • Power types
  • Review

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