Latest progress in atmospheric pressure plasma jet array

Yaodong Zhou, Zhi Fang, Weijie Wu

Research output: Contribution to journalArticlepeer-review

4 Scopus citations

Abstract

The latest progress of the non-thermal, atmospheric pressure plasma-jet array, with quite a few technical strengths, including but not limited to the low operating temperature, easy operation, good controllability and wide plasma coverage, was tentatively reviewed in a thought provoking way. The discussions centered on: I) The structures of a plasma jet unit and jet array (especially 1-D and 2-D arrays), their plasma generation modes and power supplies; II) The evaluation techniques of the discharge characteristics and conventional diagnostic methods of the plasma jet arrays, and III) Typical applications of the plasma jet arrays in modification of solid surfaces, thin film synthesis, and biological and medical research, etc. In addition, the plasma generation mechanisms, technological problems and development trends of the plasma jet arrays were also briefly discussed.

Original languageEnglish
Pages (from-to)1294-1303
Number of pages10
JournalZhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology
Volume34
Issue number12
DOIs
StatePublished - 1 Dec 2014

Keywords

  • Array
  • Atmospheric pressure
  • Jet
  • Low temperature plasma
  • Review

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