TY - JOUR
T1 - Recent progress of integrated circuits and optoelectronic chips
AU - Hao, Yue
AU - Xiang, Shuiying
AU - Han, Genquan
AU - Zhang, Jincheng
AU - Ma, Xiaohua
AU - Zhu, Zhangming
AU - Guo, Xingxing
AU - Zhang, Yahui
AU - Han, Yanan
AU - Song, Ziwei
AU - Liu, Yan
AU - Yang, Ling
AU - Zhou, Hong
AU - Shi, Jiangyi
AU - Zhang, Wei
AU - Xu, Min
AU - Zhao, Weisheng
AU - Pan, Biao
AU - Huang, Yangqi
AU - Liu, Qi
AU - Cai, Yimao
AU - Zhu, Jian
AU - Ou, Xin
AU - You, Tiangui
AU - Wu, Huaqiang
AU - Gao, Bin
AU - Zhang, Zhiyong
AU - Guo, Guoping
AU - Chen, Yonghua
AU - Liu, Yong
AU - Chen, Xiangfei
AU - Xue, Chunlai
AU - Wang, Xingjun
AU - Zhao, Lixia
AU - Zou, Xihua
AU - Yan, Lianshan
AU - Li, Ming
N1 - Publisher Copyright:
© 2021, Science China Press and Springer-Verlag GmbH Germany, part of Springer Nature.
PY - 2021/10
Y1 - 2021/10
N2 - Integrated circuits (ICs) and optoelectronic chips are the foundation stones of the modern information society. The IC industry has been driven by the so-called “Moore’s law” in the past 60 years, and now has entered the post Moore’s law era. In this paper, we review the recent progress of ICs and optoelectronic chips. The research status, technical challenges and development trend of devices, chips and integrated technologies of typical IC and optoelectronic chips are focused on. The main contents include the development law of IC and optoelectronic chip technology, the IC design and processing technology, emerging memory and chip architecture, brain-like chip structure and its mechanism, heterogeneous integration, quantum chip technology, silicon photonics chip technology, integrated microwave photonic chip, and optoelectronic hybrid integrated chip.
AB - Integrated circuits (ICs) and optoelectronic chips are the foundation stones of the modern information society. The IC industry has been driven by the so-called “Moore’s law” in the past 60 years, and now has entered the post Moore’s law era. In this paper, we review the recent progress of ICs and optoelectronic chips. The research status, technical challenges and development trend of devices, chips and integrated technologies of typical IC and optoelectronic chips are focused on. The main contents include the development law of IC and optoelectronic chip technology, the IC design and processing technology, emerging memory and chip architecture, brain-like chip structure and its mechanism, heterogeneous integration, quantum chip technology, silicon photonics chip technology, integrated microwave photonic chip, and optoelectronic hybrid integrated chip.
KW - hybrid integration
KW - integrated circuit
KW - integrated microwave photonic
KW - optoelectronic device and chip
KW - photonic integrated circuit
KW - photonic neural computing
KW - quantum chip
KW - semiconductor science and technology
KW - silicon photonics
KW - wide bandgap semiconductors
UR - http://www.scopus.com/inward/record.url?scp=85107387795&partnerID=8YFLogxK
U2 - 10.1007/s11432-021-3235-7
DO - 10.1007/s11432-021-3235-7
M3 - 文献综述
AN - SCOPUS:85107387795
SN - 1674-733X
VL - 64
JO - Science China Information Sciences
JF - Science China Information Sciences
IS - 10
M1 - 201401
ER -