Surface Oxidation and Metallization of AlN Ceramics by Mo-Mn Process

Metallized layer was prepared by normal Mo-Mn progress on the surface of the oxidized AlN ceramics, which were prepared by pressureless sintering method. And the Mo-Mn/Ni composite metallized layer was obtained by plating nickel on the surface of the Mo-Mn metal layer. The effects of oxidation and metallization of AlN ceramics on thermal property, mechanical property, surface phase composition and microstructure were studied. The results show that a uniform Al₂O₃ layer is prepared on the surface of AlN ceramics after oxidized at 1100℃ for 3 h. Thermal conductivity and flexural strength increase by 6.2% and 26.6%, respectively. Mo-Mn/Ni composite metallization layer is generate on the oxidized AlN sample by Mo-Mn progress and electroless plating process. The thickness of the Mo-Mn/Ni composite metallization layer prepared on the suface of AlN ceramic is about 28 μm. The diffusion layer is formed among the Al₂O₃ layer, Mo-Mn layer and Ni layer through the migration of elements, and the interlayer combinations are tight. The thermal diffusivity increase by 3.8% compared with the AlN ceramic substrate.