Tin assisted transfer of electroplated metal nanostructures and its application in flexible chiral metamaterials

Liang Fang, Ming Wei, Nantakan Wongkasem, Hamzeh Jaradat, Anas Mokhlis, Jia Shen, Alkim Akyurtlu, Kenneth Marx, Carol Barry, Joey Mead

Research output: Contribution to journalArticlepeer-review

3 Scopus citations

Abstract

A novel method named tin-assisted transfer of nanoscale electroplated metal structures was introduced for the fabrication of flexible devices. With the addition of a tin releasing layer, electroplated metal structures, which were achieved on rigid substrates using a combination of electron beam lithography and electroplating, were successfully transferred to flexible substrates. Using this method, various metal (Ag, Au, and Pt) structures were patterned onto flexible substrates. To demonstrate the utility of this process for fabrication of flexible devices, a mid-infrared flexible metamaterial with chiral structures was successfully produced.

Original languageEnglish
Pages (from-to)42-49
Number of pages8
JournalMicroelectronic Engineering
Volume107
DOIs
StatePublished - 2013
Externally publishedYes

Keywords

  • Electroplating
  • Flexible devices
  • Metamaterials
  • Silver
  • Tin

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