Generation and characteristics of two-dimension argon plasma jet array

A novel source was successfully developed to generate 2-D argon plasma jet-array.The hexagonal jet-array consists of the 7 stainless-steel tube cathodes,separately enclosed by glass tubes,and the cylindrical copper plate anode with 7 hexagonally aligned holes.The influence of the gas flow-rate,cathode spacing and voltage,on plasma properties and emission behavior,was investigated for design optimization.The test results show that strongly depending on the cathode spacing and voltage,the newly-developed source is capable of generating stable,uniform,large working-area plasma with high radical density.For example,as the gas flow-rate increased and the spacing decreased,Coulomb interaction increasingly affects the jet deflection.At a spacing of 8 mm,no deflection was observed.Driven by 8~9.5 kV with spacing of 2,5 and 8 mm,the working-areas were 7.64,15.3 and 29.6 cm²,respectively.The stable discharge power and discharge current were hundreds of W and mA.