@inproceedings{11c80d791d74494ab92b5f9283f3288a,
title = "Indium-tin oxide conductive films on flexible substrates deposited by DC magnetron sputtering method",
abstract = "Indium tin oxide (ITO) films on flexible polyethylene terephthalate (PET) substrates with low square resistivity and high transmittance in visible region are prepared by DC magnetron sputtering deposition method. The dependence of electrical property of ITO films on substrate temperature and DC power is compared using PET and glass substrates. The results imply that the change trend of electrical property of ITO films is similar no matter what kind of substrate is used. Using the ITO-coated substrates as anode, organic light-emitting devices (OLEDs) consisted of PET/ITO/NPB/Alq/Mg: Ag are fabricated. The electroluminescence performance of the flexible devices is comparable to the identical devices made of ITO-coated rigid glass substrates.",
keywords = "DC magnetron sputtering, Flexible substrate, ITO thin films, Organic light-emitting devices (OLEDs)",
author = "Nana Wang and Junsheng Yu and Hui Lin and Shuangling Lou and Yadong Jiang",
year = "2009",
doi = "10.1117/12.830881",
language = "英语",
isbn = "9780819475428",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
booktitle = "4th International Symposium on Advanced Optical Manufacturing and Testing Technologies",
note = "4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies ; Conference date: 19-11-2008 Through 21-11-2008",
}