Investigation of ZnO films on Si<111> substrate grown by low energy O⁺ assisted pulse laser deposited technology

Zinc oxide thin films (ZnO) with different thickness were prepared on Si (111) substrates using low energy O⁺ assisted pulse laser deposition (PLD). The structural and morphological properties of the films were investigated by X-ray diffraction (XRD) and atomic force microscopy (AFM) measurements, respectively. The quality of ZnO films was also examined by using Rutherford backscattering spectroscopy/ion channeling (RBS/C) techniques. XRD showed that there was only one sharp diffraction peak at 2θ = 34.3° with the full width at the half maximum (FWHM) of around 0.34° for two ZnO samples, which also indicated that ZnO thin films had a good c-axis preferred orientation. Results of Rutherford backscattering and ion channeling clearly indicated that the Zn:O ratio in zinc oxide thin film approached to unity and the ZnO thin film grown by low energy O⁺ assisted pulse laser deposition had a polycrystalline structure. In the case of ZnO film fabricated by low energy O⁺ assisted pulse laser deposited under identical experimental conditions except growth time, AFM analysis has shown that the root mean square (RMS) roughness (2.37 nm) of thinner ZnO film (35 nm) was far below that (13.45 nm) of the thicker ZnO film (72 nm).