Research on antireflection characteristic of rectangular subwavelength surface-relief structure

科研成果: 书/报告/会议事项章节会议稿件同行评审

摘要

In this paper, using effective-medium theory (EMT) and finite different time domain (FDTD), the dependence of reflectivity to 1.06 μm incident light upon structural parameters of rectangular subwavelength surface-relief structure has been discussed, the reliability of FDTD has been proved, and the validity of the two theories has been contrasted. The influence of refractive index and filled factor to reflectivity has been analyzed detailedly. And the structural parameters also have been discussed by diffraction orders in the energy field of reflective area with FDTD. The results shows that the best filled factor is near 0.7, the structure periods should less than 0.6λ, and the structure thickness would be set to λ/4neff. It can be used as the basis for design and fabrication of surface structural materials with proper antireflection property.

源语言英语
主期刊名4th International Symposium on Advanced Optical Manufacturing and Testing Technologies
主期刊副标题Advanced Optical Manufacturing Technologies
DOI
出版状态已出版 - 2009
活动4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies - Chengdu, 中国
期限: 19 11月 200821 11月 2008

出版系列

姓名Proceedings of SPIE - The International Society for Optical Engineering
7282
ISSN(印刷版)0277-786X

会议

会议4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies
国家/地区中国
Chengdu
时期19/11/0821/11/08

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