TY - JOUR
T1 - Synthesis and Characterization of Block Copolymers for Nanolithography Based on Thiol-Ene “Click” Functionalized Polystyrene-Block-Polybutadiene
AU - Feng, Hongbo
AU - Dolejsi, Moshe
AU - Zhu, Ning
AU - Griffin, Philip J.
AU - Craig, Gordon S.W.
AU - Chen, Wen
AU - Rowan, Stuart J.
AU - Nealey, Paul F.
N1 - Publisher Copyright:
© 2022 The Authors. Advanced Functional Materials published by Wiley-VCH GmbH.
PY - 2022/11/10
Y1 - 2022/11/10
N2 - In developing block copolymers (BCPs) for nanolithography, the preferred materials and processes are BCPs that can be thermally annealed with a free surface to yield perpendicularly orientated nanodomains with specific feature sizes and morphologies. Thiol-ene “click” chemistry is used to modify a single parent polystyrene-block-poly(1,2-butadiene) (PS-b-PB) to create both cylinder- and lamellae-forming A-block-(B-random-C) BCPs with different Flory–Huggins parameters (χs) while maintaining an equal surface energy (γ, Δγ = 0) between the blocks, necessary to form perpendicular nanodomains by thermal annealing with a free surface. The use of BCPs with an A-block-(B-random-C) architecture effectively decouples the covarying properties of χ and Δγ. The effects of the size of the thiol and degree of thiol functionalization (φ) on χ, morphology, and Δγ of the blocks are investigated for four different thiols. Modification of PS-b-PB with methyl thioglycolate or 2-(Boc-amino)ethanethiol creates BCPs that form cylinders, whereas modification with smaller thiols, mercaptoethanol or 1-thioglycerol, retains the lamellar morphology of the parent PS-b-PB. Cross-linking of the double bonds in PB at annealing temperatures prevents directed self-assembly (DSA) of these BCPs, but by adding a radical scavenger, butylated hydroxytoluene, the cross-linking can be suppressed, enabling DSA.
AB - In developing block copolymers (BCPs) for nanolithography, the preferred materials and processes are BCPs that can be thermally annealed with a free surface to yield perpendicularly orientated nanodomains with specific feature sizes and morphologies. Thiol-ene “click” chemistry is used to modify a single parent polystyrene-block-poly(1,2-butadiene) (PS-b-PB) to create both cylinder- and lamellae-forming A-block-(B-random-C) BCPs with different Flory–Huggins parameters (χs) while maintaining an equal surface energy (γ, Δγ = 0) between the blocks, necessary to form perpendicular nanodomains by thermal annealing with a free surface. The use of BCPs with an A-block-(B-random-C) architecture effectively decouples the covarying properties of χ and Δγ. The effects of the size of the thiol and degree of thiol functionalization (φ) on χ, morphology, and Δγ of the blocks are investigated for four different thiols. Modification of PS-b-PB with methyl thioglycolate or 2-(Boc-amino)ethanethiol creates BCPs that form cylinders, whereas modification with smaller thiols, mercaptoethanol or 1-thioglycerol, retains the lamellar morphology of the parent PS-b-PB. Cross-linking of the double bonds in PB at annealing temperatures prevents directed self-assembly (DSA) of these BCPs, but by adding a radical scavenger, butylated hydroxytoluene, the cross-linking can be suppressed, enabling DSA.
KW - Flory–Huggins interaction parameter
KW - block copolymers
KW - click chemistry
KW - directed self-assemblies
KW - equal surface energy
KW - high throughput approaches
UR - http://www.scopus.com/inward/record.url?scp=85137327510&partnerID=8YFLogxK
U2 - 10.1002/adfm.202206836
DO - 10.1002/adfm.202206836
M3 - 文章
AN - SCOPUS:85137327510
SN - 1616-301X
VL - 32
JO - Advanced Functional Materials
JF - Advanced Functional Materials
IS - 46
M1 - 2206836
ER -