面向亚 5 nm 图案化含硅嵌段共聚物的合成与自组装

Translated title of the contribution: Synthesis and Self-assembly of Silicon-containing Block Copolymers for Sub 5 nm Nanolithography

Yong Xin Tao, Lei Lei Chen, Yi Huan Liu, Xin Hu, Ning Zhu, Kai Guo

Research output: Contribution to journal › Review article › peer-review

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