@article{2ffe3e9a53994c41b5579c2a65ad49da,
title = "Gas phase reaction between MCl4 and NH3: Monomers or oligomers?",
keywords = "ClSiNH oligomers, DFT calculations, Nitride films",
author = "Davydova, {E. I.} and Timoshkin, {A. Y.} and Sevastianova, {T. N.} and Suvorov, {A. V.} and G. Frenking",
year = "2004",
month = apr,
doi = "10.1080/10426500490429013",
language = "英语",
volume = "179",
pages = "953--954",
journal = "Phosphorus, Sulfur and Silicon and the Related Elements",
issn = "1042-6507",
publisher = "Taylor and Francis Ltd.",
number = "4-5",
}