Gas phase reaction between MCl4 and NH3: Monomers or oligomers?

E. I. Davydova, A. Y. Timoshkin, T. N. Sevastianova, A. V. Suvorov, G. Frenking

Research output: Contribution to journalArticlepeer-review

3 Scopus citations
Original languageEnglish
Pages (from-to)953-954
Number of pages2
JournalPhosphorus, Sulfur and Silicon and the Related Elements
Volume179
Issue number4-5
DOIs
StatePublished - Apr 2004
Externally publishedYes

Keywords

  • ClSiNH oligomers
  • DFT calculations
  • Nitride films

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