Indium-tin oxide conductive films on flexible substrates deposited by DC magnetron sputtering method

Nana Wang, Junsheng Yu, Hui Lin, Shuangling Lou, Yadong Jiang

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Scopus citations

Abstract

Indium tin oxide (ITO) films on flexible polyethylene terephthalate (PET) substrates with low square resistivity and high transmittance in visible region are prepared by DC magnetron sputtering deposition method. The dependence of electrical property of ITO films on substrate temperature and DC power is compared using PET and glass substrates. The results imply that the change trend of electrical property of ITO films is similar no matter what kind of substrate is used. Using the ITO-coated substrates as anode, organic light-emitting devices (OLEDs) consisted of PET/ITO/NPB/Alq/Mg: Ag are fabricated. The electroluminescence performance of the flexible devices is comparable to the identical devices made of ITO-coated rigid glass substrates.

Original languageEnglish
Title of host publication4th International Symposium on Advanced Optical Manufacturing and Testing Technologies
Subtitle of host publicationAdvanced Optical Manufacturing Technologies
DOIs
StatePublished - 2009
Externally publishedYes
Event4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies - Chengdu, China
Duration: 19 Nov 200821 Nov 2008

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume7282
ISSN (Print)0277-786X

Conference

Conference4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies
Country/TerritoryChina
CityChengdu
Period19/11/0821/11/08

Keywords

  • DC magnetron sputtering
  • Flexible substrate
  • ITO thin films
  • Organic light-emitting devices (OLEDs)

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