Theoretical ab initio study of TiCl4 ammonolysis: Gas phase reactions of TiN chemical vapor deposition

Magdalena Siodmiak, Gernot Frenking, Anatoli Korkin

Research output: Contribution to journalArticlepeer-review

19 Scopus citations

Fingerprint

Dive into the research topics of 'Theoretical ab initio study of TiCl4 ammonolysis: Gas phase reactions of TiN chemical vapor deposition'. Together they form a unique fingerprint.

Chemistry