Thermodynamics and kinetics of initial gas phase reactions in chemical vapor deposition of titanium nitride. Theoretical study of TiCl4 ammonolysis

Stanislav Y.A. Umanskii, Konstantin P. Novoselov, Airat K.H. Minushev, Magdalena Siodmiak, Gernot Frenking, Anatoli A. Korkin

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