Latest progress in atmospheric pressure plasma jet array

Yaodong Zhou, Zhi Fang, Weijie Wu

科研成果: 期刊稿件文章同行评审

4 引用 (Scopus)

摘要

The latest progress of the non-thermal, atmospheric pressure plasma-jet array, with quite a few technical strengths, including but not limited to the low operating temperature, easy operation, good controllability and wide plasma coverage, was tentatively reviewed in a thought provoking way. The discussions centered on: I) The structures of a plasma jet unit and jet array (especially 1-D and 2-D arrays), their plasma generation modes and power supplies; II) The evaluation techniques of the discharge characteristics and conventional diagnostic methods of the plasma jet arrays, and III) Typical applications of the plasma jet arrays in modification of solid surfaces, thin film synthesis, and biological and medical research, etc. In addition, the plasma generation mechanisms, technological problems and development trends of the plasma jet arrays were also briefly discussed.

源语言英语
页(从-至)1294-1303
页数10
期刊Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology
34
12
DOI
出版状态已出版 - 1 12月 2014

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