TY - JOUR
T1 - Latest progress in atmospheric pressure plasma jet array
AU - Zhou, Yaodong
AU - Fang, Zhi
AU - Wu, Weijie
PY - 2014/12/1
Y1 - 2014/12/1
N2 - The latest progress of the non-thermal, atmospheric pressure plasma-jet array, with quite a few technical strengths, including but not limited to the low operating temperature, easy operation, good controllability and wide plasma coverage, was tentatively reviewed in a thought provoking way. The discussions centered on: I) The structures of a plasma jet unit and jet array (especially 1-D and 2-D arrays), their plasma generation modes and power supplies; II) The evaluation techniques of the discharge characteristics and conventional diagnostic methods of the plasma jet arrays, and III) Typical applications of the plasma jet arrays in modification of solid surfaces, thin film synthesis, and biological and medical research, etc. In addition, the plasma generation mechanisms, technological problems and development trends of the plasma jet arrays were also briefly discussed.
AB - The latest progress of the non-thermal, atmospheric pressure plasma-jet array, with quite a few technical strengths, including but not limited to the low operating temperature, easy operation, good controllability and wide plasma coverage, was tentatively reviewed in a thought provoking way. The discussions centered on: I) The structures of a plasma jet unit and jet array (especially 1-D and 2-D arrays), their plasma generation modes and power supplies; II) The evaluation techniques of the discharge characteristics and conventional diagnostic methods of the plasma jet arrays, and III) Typical applications of the plasma jet arrays in modification of solid surfaces, thin film synthesis, and biological and medical research, etc. In addition, the plasma generation mechanisms, technological problems and development trends of the plasma jet arrays were also briefly discussed.
KW - Array
KW - Atmospheric pressure
KW - Jet
KW - Low temperature plasma
KW - Review
UR - http://www.scopus.com/inward/record.url?scp=84921674841&partnerID=8YFLogxK
U2 - 10.13922/j.cnki.cjovst.2014.12.04
DO - 10.13922/j.cnki.cjovst.2014.12.04
M3 - 文章
AN - SCOPUS:84921674841
SN - 1672-7126
VL - 34
SP - 1294
EP - 1303
JO - Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology
JF - Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology
IS - 12
ER -