Tin assisted transfer of electroplated metal nanostructures and its application in flexible chiral metamaterials

Liang Fang, Ming Wei, Nantakan Wongkasem, Hamzeh Jaradat, Anas Mokhlis, Jia Shen, Alkim Akyurtlu, Kenneth Marx, Carol Barry, Joey Mead

科研成果: 期刊稿件文章同行评审

3 引用 (Scopus)

摘要

A novel method named tin-assisted transfer of nanoscale electroplated metal structures was introduced for the fabrication of flexible devices. With the addition of a tin releasing layer, electroplated metal structures, which were achieved on rigid substrates using a combination of electron beam lithography and electroplating, were successfully transferred to flexible substrates. Using this method, various metal (Ag, Au, and Pt) structures were patterned onto flexible substrates. To demonstrate the utility of this process for fabrication of flexible devices, a mid-infrared flexible metamaterial with chiral structures was successfully produced.

源语言英语
页(从-至)42-49
页数8
期刊Microelectronic Engineering
107
DOI
出版状态已出版 - 2013
已对外发布

指纹

探究 'Tin assisted transfer of electroplated metal nanostructures and its application in flexible chiral metamaterials' 的科研主题。它们共同构成独一无二的指纹。

引用此