Fabrication and properties of DC magnetron sputtered indium tin oxide on flexible plastic substrate

Hui Lin; Junsheng Yu; Nana Wang; Shuangling Lou; Yadong Jiang

Fabrication and properties of DC magnetron sputtered indium tin oxide on flexible plastic substrate

Hui Lin, Junsheng Yu, Nana Wang, Shuangling Lou, Yadong Jiang

University of Electronic Science and Technology of China

Research output: Contribution to journal › Article › peer-review

6 Scopus citations

Abstract

Indium tin oxide (ITO) thin films deposited on flexible polyethylene terephthalate (PET) substrates at low temperature by DC magnetron sputtering from an In-Sn (90-10 wt pct) alloy target were studied. The correlation between deposition conditions and ITO property was systematically investigated and characterized. These as-deposited ITO films were used as the anode contact for flexible organic light-emitting diodes (FOLEDs). The fabricated FOLEDs with a structure of PET/ITO/NPB (50 nm)/Alq (20 nm)/Mg:Ag (100 nm) showed a maximum luminance of 2125 cd/m² at 13 V.

Original language	English
Pages (from-to)	119-122
Number of pages	4
Journal	Journal of Materials Science and Technology
Volume	25
Issue number	1
State	Published - Jan 2009
Externally published	Yes

Keywords

DC sputtering
Flexible Organic light-emitting diodes
Indium tin oxide

Cite this

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title = "Fabrication and properties of DC magnetron sputtered indium tin oxide on flexible plastic substrate",

abstract = "Indium tin oxide (ITO) thin films deposited on flexible polyethylene terephthalate (PET) substrates at low temperature by DC magnetron sputtering from an In-Sn (90-10 wt pct) alloy target were studied. The correlation between deposition conditions and ITO property was systematically investigated and characterized. These as-deposited ITO films were used as the anode contact for flexible organic light-emitting diodes (FOLEDs). The fabricated FOLEDs with a structure of PET/ITO/NPB (50 nm)/Alq (20 nm)/Mg:Ag (100 nm) showed a maximum luminance of 2125 cd/m2 at 13 V.",

keywords = "DC sputtering, Flexible Organic light-emitting diodes, Indium tin oxide",

author = "Hui Lin and Junsheng Yu and Nana Wang and Shuangling Lou and Yadong Jiang",

year = "2009",

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T1 - Fabrication and properties of DC magnetron sputtered indium tin oxide on flexible plastic substrate

AU - Lin, Hui

AU - Yu, Junsheng

AU - Wang, Nana

AU - Lou, Shuangling

AU - Jiang, Yadong

PY - 2009/1

Y1 - 2009/1

N2 - Indium tin oxide (ITO) thin films deposited on flexible polyethylene terephthalate (PET) substrates at low temperature by DC magnetron sputtering from an In-Sn (90-10 wt pct) alloy target were studied. The correlation between deposition conditions and ITO property was systematically investigated and characterized. These as-deposited ITO films were used as the anode contact for flexible organic light-emitting diodes (FOLEDs). The fabricated FOLEDs with a structure of PET/ITO/NPB (50 nm)/Alq (20 nm)/Mg:Ag (100 nm) showed a maximum luminance of 2125 cd/m2 at 13 V.

AB - Indium tin oxide (ITO) thin films deposited on flexible polyethylene terephthalate (PET) substrates at low temperature by DC magnetron sputtering from an In-Sn (90-10 wt pct) alloy target were studied. The correlation between deposition conditions and ITO property was systematically investigated and characterized. These as-deposited ITO films were used as the anode contact for flexible organic light-emitting diodes (FOLEDs). The fabricated FOLEDs with a structure of PET/ITO/NPB (50 nm)/Alq (20 nm)/Mg:Ag (100 nm) showed a maximum luminance of 2125 cd/m2 at 13 V.

KW - DC sputtering

KW - Flexible Organic light-emitting diodes

KW - Indium tin oxide

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M3 - 文章

AN - SCOPUS:60949099556

SN - 1005-0302

VL - 25

SP - 119

EP - 122

JO - Journal of Materials Science and Technology

JF - Journal of Materials Science and Technology

IS - 1

ER -

Fabrication and properties of DC magnetron sputtered indium tin oxide on flexible plastic substrate

Abstract

Keywords

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