Fabrication and properties of DC magnetron sputtered indium tin oxide on flexible plastic substrate

Hui Lin; Junsheng Yu; Nana Wang; Shuangling Lou; Yadong Jiang

Fabrication and properties of DC magnetron sputtered indium tin oxide on flexible plastic substrate

Hui Lin, Junsheng Yu, Nana Wang, Shuangling Lou, Yadong Jiang

University of Electronic Science and Technology of China

科研成果: 期刊稿件 › 文章 › 同行评审

6 引用（Scopus）

摘要

Indium tin oxide (ITO) thin films deposited on flexible polyethylene terephthalate (PET) substrates at low temperature by DC magnetron sputtering from an In-Sn (90-10 wt pct) alloy target were studied. The correlation between deposition conditions and ITO property was systematically investigated and characterized. These as-deposited ITO films were used as the anode contact for flexible organic light-emitting diodes (FOLEDs). The fabricated FOLEDs with a structure of PET/ITO/NPB (50 nm)/Alq (20 nm)/Mg:Ag (100 nm) showed a maximum luminance of 2125 cd/m² at 13 V.

源语言	英语
页（从-至）	119-122
页数	4
期刊	Journal of Materials Science and Technology
卷	25
期	1
出版状态	已出版 - 1月 2009
已对外发布	是

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abstract = "Indium tin oxide (ITO) thin films deposited on flexible polyethylene terephthalate (PET) substrates at low temperature by DC magnetron sputtering from an In-Sn (90-10 wt pct) alloy target were studied. The correlation between deposition conditions and ITO property was systematically investigated and characterized. These as-deposited ITO films were used as the anode contact for flexible organic light-emitting diodes (FOLEDs). The fabricated FOLEDs with a structure of PET/ITO/NPB (50 nm)/Alq (20 nm)/Mg:Ag (100 nm) showed a maximum luminance of 2125 cd/m2 at 13 V.",

keywords = "DC sputtering, Flexible Organic light-emitting diodes, Indium tin oxide",

author = "Hui Lin and Junsheng Yu and Nana Wang and Shuangling Lou and Yadong Jiang",

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T1 - Fabrication and properties of DC magnetron sputtered indium tin oxide on flexible plastic substrate

AU - Lin, Hui

AU - Yu, Junsheng

AU - Wang, Nana

AU - Lou, Shuangling

AU - Jiang, Yadong

PY - 2009/1

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N2 - Indium tin oxide (ITO) thin films deposited on flexible polyethylene terephthalate (PET) substrates at low temperature by DC magnetron sputtering from an In-Sn (90-10 wt pct) alloy target were studied. The correlation between deposition conditions and ITO property was systematically investigated and characterized. These as-deposited ITO films were used as the anode contact for flexible organic light-emitting diodes (FOLEDs). The fabricated FOLEDs with a structure of PET/ITO/NPB (50 nm)/Alq (20 nm)/Mg:Ag (100 nm) showed a maximum luminance of 2125 cd/m2 at 13 V.

AB - Indium tin oxide (ITO) thin films deposited on flexible polyethylene terephthalate (PET) substrates at low temperature by DC magnetron sputtering from an In-Sn (90-10 wt pct) alloy target were studied. The correlation between deposition conditions and ITO property was systematically investigated and characterized. These as-deposited ITO films were used as the anode contact for flexible organic light-emitting diodes (FOLEDs). The fabricated FOLEDs with a structure of PET/ITO/NPB (50 nm)/Alq (20 nm)/Mg:Ag (100 nm) showed a maximum luminance of 2125 cd/m2 at 13 V.

KW - DC sputtering

KW - Flexible Organic light-emitting diodes

KW - Indium tin oxide

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Fabrication and properties of DC magnetron sputtered indium tin oxide on flexible plastic substrate

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