Fabrication and property of conductive substrate for flexible organic light-emitting devices

Na Na Wang; Jun Sheng Yu; Hui Lin; Chun Hua Huang; Ya Dong Jiang

Fabrication and property of conductive substrate for flexible organic light-emitting devices

Na Na Wang, Jun Sheng Yu, Hui Lin, Chun Hua Huang, Ya Dong Jiang

University of Electronic Science and Technology of China

Research output: Contribution to journal › Article › peer-review

3 Scopus citations

Abstract

Indium-tin oxide (ITO) film on flexible polyethylene terephthalate (PET) substrates were prepared by DC magnetron sputtering deposition method. The effects of substrate temperature, sputtering power and pressure on ITO film properties were investigated. The results shown that ITO films with a low square resistivity of 50 Ω/□ and a high transmittance in visible region over 90% can be achieved at a DC power of 100 W, working pressure of 2.66 × 10^-1 Pa and substrate temperature of 50 °C. Using the fabricated flexible ITO substrate as the anode, the organic light-emitting device consisting of PET/ITO/NPB/Alq₃/Mg: Ag is fabricated. The obtained FOLEDs have a maximum luminance of 2 834 cd/m² at 13 V.

Original language	English
Pages (from-to)	967-972
Number of pages	6
Journal	Chinese Journal of Luminescence
Volume	29
Issue number	6
State	Published - Dec 2008
Externally published	Yes

Keywords

DC magnetron spottering
Flexible substrate
ITO thin films
Organic light-emitting devices (OELDs)

Cite this

@article{4142b66c45104b2bab20454975245e43,

title = "Fabrication and property of conductive substrate for flexible organic light-emitting devices",

abstract = "Indium-tin oxide (ITO) film on flexible polyethylene terephthalate (PET) substrates were prepared by DC magnetron sputtering deposition method. The effects of substrate temperature, sputtering power and pressure on ITO film properties were investigated. The results shown that ITO films with a low square resistivity of 50 Ω/□ and a high transmittance in visible region over 90% can be achieved at a DC power of 100 W, working pressure of 2.66 × 10-1 Pa and substrate temperature of 50 °C. Using the fabricated flexible ITO substrate as the anode, the organic light-emitting device consisting of PET/ITO/NPB/Alq3/Mg: Ag is fabricated. The obtained FOLEDs have a maximum luminance of 2 834 cd/m2 at 13 V.",

keywords = "DC magnetron spottering, Flexible substrate, ITO thin films, Organic light-emitting devices (OELDs)",

author = "Wang, {Na Na} and Yu, {Jun Sheng} and Hui Lin and Huang, {Chun Hua} and Jiang, {Ya Dong}",

year = "2008",

month = dec,

language = "英语",

volume = "29",

pages = "967--972",

journal = "Chinese Journal of Luminescence",

issn = "1000-7032",

publisher = "Chines Academy of Sciences",

number = "6",

}

TY - JOUR

T1 - Fabrication and property of conductive substrate for flexible organic light-emitting devices

AU - Wang, Na Na

AU - Yu, Jun Sheng

AU - Lin, Hui

AU - Huang, Chun Hua

AU - Jiang, Ya Dong

PY - 2008/12

Y1 - 2008/12

N2 - Indium-tin oxide (ITO) film on flexible polyethylene terephthalate (PET) substrates were prepared by DC magnetron sputtering deposition method. The effects of substrate temperature, sputtering power and pressure on ITO film properties were investigated. The results shown that ITO films with a low square resistivity of 50 Ω/□ and a high transmittance in visible region over 90% can be achieved at a DC power of 100 W, working pressure of 2.66 × 10-1 Pa and substrate temperature of 50 °C. Using the fabricated flexible ITO substrate as the anode, the organic light-emitting device consisting of PET/ITO/NPB/Alq3/Mg: Ag is fabricated. The obtained FOLEDs have a maximum luminance of 2 834 cd/m2 at 13 V.

AB - Indium-tin oxide (ITO) film on flexible polyethylene terephthalate (PET) substrates were prepared by DC magnetron sputtering deposition method. The effects of substrate temperature, sputtering power and pressure on ITO film properties were investigated. The results shown that ITO films with a low square resistivity of 50 Ω/□ and a high transmittance in visible region over 90% can be achieved at a DC power of 100 W, working pressure of 2.66 × 10-1 Pa and substrate temperature of 50 °C. Using the fabricated flexible ITO substrate as the anode, the organic light-emitting device consisting of PET/ITO/NPB/Alq3/Mg: Ag is fabricated. The obtained FOLEDs have a maximum luminance of 2 834 cd/m2 at 13 V.

KW - DC magnetron spottering

KW - Flexible substrate

KW - ITO thin films

KW - Organic light-emitting devices (OELDs)

UR - http://www.scopus.com/inward/record.url?scp=60549113524&partnerID=8YFLogxK

M3 - 文章

AN - SCOPUS:60549113524

SN - 1000-7032

VL - 29

SP - 967

EP - 972

JO - Chinese Journal of Luminescence

JF - Chinese Journal of Luminescence

IS - 6

ER -

Fabrication and property of conductive substrate for flexible organic light-emitting devices

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