摘要
Indium-tin oxide (ITO) film on flexible polyethylene terephthalate (PET) substrates were prepared by DC magnetron sputtering deposition method. The effects of substrate temperature, sputtering power and pressure on ITO film properties were investigated. The results shown that ITO films with a low square resistivity of 50 Ω/□ and a high transmittance in visible region over 90% can be achieved at a DC power of 100 W, working pressure of 2.66 × 10-1 Pa and substrate temperature of 50 °C. Using the fabricated flexible ITO substrate as the anode, the organic light-emitting device consisting of PET/ITO/NPB/Alq3/Mg: Ag is fabricated. The obtained FOLEDs have a maximum luminance of 2 834 cd/m2 at 13 V.
源语言 | 英语 |
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页(从-至) | 967-972 |
页数 | 6 |
期刊 | Chinese Journal of Luminescence |
卷 | 29 |
期 | 6 |
出版状态 | 已出版 - 12月 2008 |
已对外发布 | 是 |